Introduction of the Course:

On December 1959, Richard P. Feynman delivered a classic talk, “There’s Plenty of Room at the Bottom,” inspiring people to explore things in a small scale. Followed by the advent of Microelectromechanical System (MEMS) technology in 1980s, electromechanical devices become smaller and smarter. Now, MEMS has been identified as one of the most promising and enabling technologies of the 21st Century and has the potential to dramatically change all of our lives. In this series of talks on MEMS sensors and actuators, we invited experts of MEMS research field to introduce the basics of MEMS, its applications and latest development.